Atom Probe Tomography
Main specifications 1. Vacuum system of vacuum chamber: Level3, vacuum of the analysis chamber<1×10^-10 torr; 2. Max. voltage pulse frequency: 500 kHz; 3. Max. laser pulse frequency: 400kHz; 4. UV laser wavelength: 257.5nm; Finest focal spot:<3 µm； 5. Max. data collection rate ions/min: > 4M； 6. Time of Flight (TOF)...
Time-of-Flight Secondary Ion Mass Spectrometry with Orbitrap analyzer
Main specifications 1. Bi ion source for analysis, ion beam current: >40 nA, maximum repetition rate: 50 kHz (for all modes of operation). 2. Pulsed ion beam current: ≥ 40 pA, minimum pulsed beam diameter: ≤ 50 nm (for high-resolution imaging modes). Fast imaging mode available, minimum beam spot diameter:...
Multi-Technique Surface Analysis System（XPS, AES, UPS, LEIPS）
Main specifications 1. Monochromatic X-ray source system (electron gun, anode target and monochromator) 2. Energy Analyzer: Energy resolution on Ag: ≤ 0.48 eV at Ag3d5/2 (FWHM) 3. Argon Ion Gun Energy: 0 - 5 kV; GCIB argon cluster ion gun maximum energy: 20 kV 4. Energy resolution of Dual-Beam Charge...
Research Atomic Force Microscope
Main specifications 1. Scan range: X, Y-axis scan range is ≥90um × 90um, and Z-axis scan range is ≥10um. 2. Closed-loop noise of X,Y-axis is ≤150pm (1Hz-1kHz), and closed-loop noise of Z-axis is ≤35pm (1Hz-1kHz). 3. Scan speed: for a 1um scan range, the number of pixels scanned is at...
Multifunctional Atomic Force Microscope
Main specifications 1. Scan range: Standard 20μm scanner (XY: 20um, Z: 1.5um), large range 100μm scanner (XY: 100um, Z: 15um) 2. Noise level: Standard scanner less than 0.03nm (RMS) 3. Maximum XY range of ±2.5mm, Z-axis stepping motor (50nm/step) with a range of 10mm, drift less than 0.03nm/sec. 4. Sample...
Surface profiler
Main specifications 1. Highest resolution: 0.38 Å 2. Testing repeatability: 5.0 Å or 0.1% 3. Minimum positive pressure during scanning: 0.03 mg 4. Total Number of measured sampling points: 400,000 5. Measuring range: 1200um 6. Sample stage XY motor drive: 150×150mm 7. Sample stage size: ≥120mm Main functions 1.Equipped with...