Surface Analysis

Main specifications

1. Scan range: X, Y-axis scan range is ≥90um × 90um, and Z-axis scan range is ≥10um.

2. Closed-loop noise of X,Y-axis is ≤150pm (1Hz-1kHz), and closed-loop noise of Z-axis is ≤35pm (1Hz-1kHz).

3. Scan speed: for a 1um scan range, the number of pixels scanned is at least 256X256, with a scanning imaging speed of not less than 40Hz; for a large scan range of 50um, the number of pixels scanned is at least 256X256, with a scanning imaging speed of not less than 15Hz.

4. Sample stage: The maximum sample diameter that can be accommodated is ≥210mm, and the maximum sample thickness that can be accommodated is ≥50mm.

5. Motor control: Sample stage movement speed is ≥40mm/s, and it is capable of rotating 360 degrees.

6. Photoelectric detector: Detection bandwidth ≥7MHz, detection system noise <10pm, height detection noise ＜25pm.

Main functions

1. PeakForce Tapping technology enables convenient acquisition of reliable high-resolution data.

2. PeakForce QNM peak force quantitative nanomechanical technology can provide multiple mechanical information, such as quantitative Young's modulus, quantitative adhesion force, quantitative sample deformation, and dissipation energy simultaneously with high-resolution morphology.

3. PeakForce TUNA peak force high-resolution current module enables simultaneous tests for high-resolution morphology, quantitative nanomechanics, and high-resolution electrical measurements.

4. The scanning capacitance microscopy (SCM) module realizes ultrafast scan imaging with rich signal channels including capacitive and deflection signals while ensuring image quality during the topography scan.

5. Equipped with a high-temperature heater and a cryogenic/heating sample stage.