Surface profiler
Asset number
MC-SA-0005
Model
Alpha-Step D-600
Brand
KLA-Tencor
Asset Leader
侯思润 Dennis Sirun HOU
Contact email
Location
W1-124
Main specifications
1. Highest resolution: 0.38 Å
2. Testing repeatability: 5.0 Å or 0.1%
3. Minimum positive pressure during scanning: 0.03 mg
4. Total Number of measured sampling points: 400,000
5. Measuring range: 1200um
6. Sample stage XY motor drive: 150×150mm
7. Sample stage size: ≥120mm
Main functions
1.Equipped with bidirectional scanning measurement function.
2.The system is equipped with an ultra-large, ultra-thick, and super smooth flat crystal of 150×150mm caliber.