Ultra-high Resolution Scanning Electron Microscope (SEM) Regulus8100
Asset number
MC-NA-0004
Model
Regulus8100
Brand
HITACHI
Asset Leader
陈海滨 Haibin CHEN
Contact email
Location
W1-126
Main specifications
1. Electron gun: Cold cathode field emission electron source;
2. Resolution：0.7nm@15kV ,0.8nm@1kV;
3. Magnification： 20 ~ 1,000,000x；
4. Accelerating voltage： 0.5 ~ 30 kV；
5. Landing voltage：0.1 ~ 2 kV；
6. Specimen Stage：4""specimen exchange device；
7. EDX dector：Oxford AZtecLive UltimMax 65;
8. Equipped with vaccum transfer system;
Main functions
1. The Regulus series ascends upon core technologies that enhance high resolution imaging and various types of anlayses complemented by a wide range of conditions at ultra-low to high accelerating voltages. It can supports the characterization of high-resolution morphology, structure, crystal information, compostion, etc. for a varity of materials and components.
2. Equippd with vaccum transfer system, specimens can be transfffer to the SEM without reacctions with oxygen, water, etc.