Scanning Electron Microscope (SEM)
Asset number
MC-NA-0006
Model
SU3900
Brand
HITACHI
Asset Leader
陈海滨 Haibin CHEN
Contact email
Location
W2-123
Main specifications
1. Tungsten Hairpin Filament Scanning Electron Microscope；
2. Resolution：3.0nm@30kV, 15nm@1kV；
3. Magnification： 5 ~ 300,000x；
4. Accelerating voltage： 0.3 ~ 30 kV；
5. Variable pressure mode：6 - 650 Pa;
6. Specimen Stage：Maximum sample size: 300mm dia. x 130mmH; 150×150mm 5 Axis motorized stage (X: 0~150mm; Y: 0~150mm; Z: 5~85mm; R: 360o; T: -20 ~90o )；
7. EDX dector：Oxford AZtecLive UltimMax 40
Main functions
1. Equipped with a large multipurpose specimen chamber，Maximum sample size: 300mm dia. x 130mmH；
2. Equipped with ultra efficient photodiode BSE;