High Resolution Scanning Electron Microscope (SEM)
Asset number
MC-NA-0005
Model
SU5000
Brand
HITACHI
Asset Leader
陈海滨 Haibin CHEN
Contact email
Location
W2-123
Main specifications
1. Electron Gun：Schottky Field Emission；
2. Resolution：1.2nm@30kV, 3.0nm@1kV；
3. Magnification： 10 ~ 600,000x；
4. Accelerating voltage： 0.5 ~ 30 kV；
5. Variable pressure mode：10~300Pa;
6. Specimen Stage：Maximum sample size: 200mm dia. x 80mmH; 100×50mm 5 Axis motorized stage (X: 0~100mm; Y: 0~50mm; Z: 3~65mm; R: 360o; T: -20 ~90o )；
7. EDX dector：Oxford AZtecLive UltimMax 40
Main functions
1. Large chamber, Maximum sample size: 200mm dia. x 80mmH；
2. High probe current（>200nA) for efficient microanlaysis (EBSD， EDX）；
3. Unparalled low vacuum (10 ~ 300 Pa) imaging with the novel Ultra Variable pressure detector (UVD);
4. Equipped with ultra efficient photodiode BSE detector and high performance EBSD;
5. Equipped with in-situ microtest tensile stage.