Nano Analysis

Main specifications

1. Electron gun: Cold cathode field emission electron source;

2. Resolution：0.6nm@15kV ,0.7nm@1kV;

3. Magnification： 20 ~ 2,000,000x；

4. Accelerating voltage: 0.5 ~ 30 kV；

5. Landing voltage: 0.01 ~ 20 kV；

6. Specimen Stage: 6 ""specimen exchange device; 110×110mm 5 Axis motorized stage（XY: 0 ~110mm; Z: 1.5~40mm; R: 360o; T: - 5 ~ 70o;)

7. EDX dector：Oxford AZtecLive UltimMax 170

Main functions

1. The Regulus series ascends upon core technologies that enhance high resolution imaging and various types of anlayses complemented by a wide range of conditions at ultra-low to high accelerating voltages. It can supports the characterization of high-resolution morphology, structure, crystal information, compostion, etc. for a varity of materials and components.

2. Contrast corresponding to various observational requirements can be obtained by utilizing the three detectors, i.e. top, upper and lower detector.

3. By combining the use of an EDX detector with a large detector area, high-spatial resolution at nanoscale levels can be realized for EDX analysis when coupled with a cold field emission gun design.

4. Non-conductive mateiterials, e.g. soft materials, can be observed. The retarding function can be effective for reducing the charging influences.