Molecular Structure Analysis

Main specifications

1. Wide spectral range 193~1690 nm; 

2. Automatic angle-changing base:45-90°; 

3. Z axis: automatic movement, maximum stroke 18mm, minimum step size 1um;

4. Spot size: normal spot 4mm in diameter, micro spot 300um in diameter;

5. Measurement parameters include: spectral ellipsometry Ψ and Δ; percentage of transmitted and reflected intensity; percentage of depolarization; generalized ellipsometry; Muller matrix; 

6. Full Mueller matrix measurement up to 0.3 seconds;

7. test accuracy:Psi 45°±0.02°，Delta 0°±0.05°,Depolarization 0%±0.5%，15 normalized Muller-Matrix elements, Diagonal 1±0.002，Off-Diagonal 0±0.002.

Main functions

1. Wide spectral range covered wavelengths from the ultraviolet to the extended near infrared 193~1690 nm;

2. the first commercial spectroscopic ellipsometer to collect all 16 elements of the Muller matrix ;

3. Small samples can be measured with focusing element; 

4. superior data accuracy and high repeatability;

5. complete material library and dispersion models;

6. Ellipsometry uses polarized light to characterize thin film and bulk materials. a change in polarization is measured after reflecting light from the surface. Thin film thickness and optical constants are derived from the measurement;

7. Map thin film uniformity of wafers or glass pannels using the automatic sample stage.